Development of absolutely radiant flux measurements with electrical calibrated microbolometer

Abstract

Absolutely flux radiometer measurements was developed with a microbolometer by using MEMS technology including lithography and etching. The radiometer is calibrated with electrical energy and adopted for absolute power and temperature drift, the sensor is called electric calibrated micro bolometer (EC mu B). Platinum is utilized to be a heater and a sensor at different layer, other electric isolation layers were used to separate signal from those two platinum layers. Those layers were integrated and constructed in a membrane which was formed by using TMAH etching solution. Accuracy of radiometer was identified that is proportional to ratio of electrical substitution power and radiant flux was measured with development of EC mu B.