微機電製程技術---微加速度計的設計分析與模擬

dc.contributor.author	邱俊誠	en_US
dc.contributor.author	JIN-CHERN(J.C.)CHIOU	en_US
dc.contributor.department	交通大學電機與控制工程系	zh_TW
dc.date.accessioned	2014-12-13T10:48:00Z
dc.date.available	2014-12-13T10:48:00Z
dc.date.issued	2000	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.identifier.govdoc	NSC89-CS-D009-016	zh_TW
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=542163&docId=99599	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/101183
dc.language.iso	zh_TW	en_US
dc.subject	微加速度計	zh_TW
dc.subject	微機電系統	zh_TW
dc.subject	模擬	zh_TW
dc.subject	Micro-accelerometer	en_US
dc.subject	Micro-electro-mechanical system (MEMS)	en_US
dc.subject	Simulation	en_US
dc.title	微機電製程技術---微加速度計的設計分析與模擬	zh_TW
dc.type	Plan	en_US

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