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Remarkably high mobility ultrathin-film metal-oxide transistor with strongly overlapped orbitals

dc.citation.epage0en_US
dc.citation.spage0en_US
dc.citation.volume6en_US
dc.citation.woscount13en_US
dc.contributor.authorShih, Chen Weien_US
dc.contributor.authorChin, Alberten_US
dc.contributor.authorLu, Chun Fuen_US
dc.contributor.authorSu, Wei Fangen_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.date.accessioned2019-04-03T06:44:50Z
dc.date.available2019-04-03T06:44:50Z
dc.date.issued2016-01-08en_US
dc.description.abstractHigh mobility channel thin-film-transistor (TFT) is crucial for both display and future generation integrated circuit. We report a new metal-oxide TFT that has an ultra-thin 4.5 nm SnO2 thickness for both active channel and source-drain regions, very high 147 cm(2)/Vs field-effect mobility, high I-ON/I-OFF of 2.3 x 10(7), small 110 mV/dec sub-threshold slope, and a low V-D of 2.5V for low power operation. This mobility is already better than chemical-vapor-deposition grown multi-layers MoS2 TFT. From first principle quantum-mechanical calculation, the high mobility TFT is due to strongly overlapped orbitals.en_US
dc.identifier.doi10.1038/srep19023en_US
dc.identifier.issn2045-2322en_US
dc.identifier.journalSCIENTIFIC REPORTSen_US
dc.identifier.urihttp://dx.doi.org/10.1038/srep19023en_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/129674
dc.identifier.wosnumberWOS:000368664400002en_US
dc.language.isoen_USen_US
dc.titleRemarkably high mobility ultrathin-film metal-oxide transistor with strongly overlapped orbitalsen_US
dc.typeArticleen_US

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