矽化物超淺接面和接觸孔研發

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902215E009095.pdf (998.38 KB)

902215E009095.pdf (998.38 KB)

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Authors

Keywords

積體電路設計 , 超淺接面 , 接觸孔 , Integrated circuit design , Ultra-shallow junction , Contact hole

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https://www.grb.gov.tw/search/planDetail?id=665784&docId=126394
https://ir.lib.nycu.edu.tw/handle/11536/93461

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研究計畫;;Research Plans