矽化物超淺接面和接觸孔研發
| dc.contributor.author | 雷添福 | en_US |
| dc.contributor.author | LEI TAN-FU | en_US |
| dc.contributor.department | 交通大學電子工程研究所 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:35:29Z | |
| dc.date.available | 2014-12-13T10:35:29Z | |
| dc.date.issued | 2001 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC90-2215-E009-095 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=665784&docId=126394 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/93461 | |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 積體電路設計 | zh_TW |
| dc.subject | 超淺接面 | zh_TW |
| dc.subject | 接觸孔 | zh_TW |
| dc.subject | Integrated circuit design | en_US |
| dc.subject | Ultra-shallow junction | en_US |
| dc.subject | Contact hole | en_US |
| dc.title | 矽化物超淺接面和接觸孔研發 | zh_TW |
| dc.title | Development of Silicide Ultra-Sallow Junction and Contact Hole | en_US |
| dc.type | Plan | en_US |
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