積體電路化學品與材料之開發---子計畫I：超微細Al/sub 2/O/sub 3/及Y-PSZ粉末之合成及其化學機械研磨劑之製備(II)
| dc.contributor.author | 涂肇嘉 | en_US |
| dc.contributor.department | 交通大學材料科學與工程研究所 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:36:49Z | |
| dc.date.available | 2014-12-13T10:36:49Z | |
| dc.date.issued | 1999 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC88-CPC-E009-009 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=461621&docId=84633 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/94190 | |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 超微粒 | zh_TW |
| dc.subject | 氧化鋁 | zh_TW |
| dc.subject | 化學機械拋光 | zh_TW |
| dc.subject | Ultrafine particle | en_US |
| dc.subject | Alumina | en_US |
| dc.subject | Chemical mechanical polishing | en_US |
| dc.title | 積體電路化學品與材料之開發---子計畫I：超微細Al/sub 2/O/sub 3/及Y-PSZ粉末之合成及其化學機械研磨劑之製備(II) | zh_TW |
| dc.title | The Syntheses of Ultrafine Al/sub 2/O/sub 3/ and Y-PSZ Powders and the Preparation of Related Chemical Mechanical Polishing Slurries (II) | en_US |
| dc.type | Plan | en_US |