A Flexible IGZO Thin-Film Transistor With Stacked TiO2-Based Dielectrics Fabricated at Room Temperature
| dc.citation.epage | 770 | en_US |
| dc.citation.issue | 6 | en_US |
| dc.citation.spage | 768 | en_US |
| dc.citation.volume | 34 | en_US |
| dc.citation.woscount | 14 | |
| dc.contributor.author | Hsu, Hsiao-Hsuan | en_US |
| dc.contributor.author | Chang, Chun-Yen | en_US |
| dc.contributor.author | Cheng, Chun-Hu | en_US |
| dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
| dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
| dc.date.accessioned | 2014-12-08T15:30:35Z | |
| dc.date.available | 2014-12-08T15:30:35Z | |
| dc.date.issued | 2013-06-01 | en_US |
| dc.description.abstract | This letter demonstrates the feasibility of full room temperature InGaZnO thin-film transistor (TFT) using trilayer gate dielectric on flexible substrate. Through integrating high-kappa SiO2/TiO2/SiO2 (STS) gate-stack as well as InGaZnO channel thickness modulation, the resulting flexible indium-gallium-zinc oxide (IGZO)/STS TFTs show low threshold voltage of 0.5 V, small subthreshold swing of 0.129 V/decade, high field effect mobility of 76 cm(2)/Vs, and good I-ON/I-OFF ratio of 6.7 x 10(5), which have the potential for the application of high-resolution flexible display. | en_US |
| dc.identifier.doi | 10.1109/LED.2013.2258455 | en_US |
| dc.identifier.issn | 0741-3106 | en_US |
| dc.identifier.journal | IEEE ELECTRON DEVICE LETTERS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1109/LED.2013.2258455 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/21854 | |
| dc.identifier.wosnumber | WOS:000319460800017 | |
| dc.language.iso | en_US | en_US |
| dc.subject | High-kappa | en_US |
| dc.subject | indium-gallium-zinc oxide (IGZO) | en_US |
| dc.subject | thin-film transistor (TFT) | en_US |
| dc.subject | TiO2 | en_US |
| dc.title | A Flexible IGZO Thin-Film Transistor With Stacked TiO2-Based Dielectrics Fabricated at Room Temperature | en_US |
| dc.type | Article | en_US |