A floating well method for exact capacitance-voltage measurement of nano technology
| dc.citation.epage | 1544 | en_US |
| dc.citation.issue | 6 | en_US |
| dc.citation.spage | 1543 | en_US |
| dc.citation.volume | 50 | en_US |
| dc.citation.woscount | 0 | |
| dc.contributor.author | Su, HD | en_US |
| dc.contributor.author | Chiou, BS | en_US |
| dc.contributor.author | Wu, SY | en_US |
| dc.contributor.author | Chang, MH | en_US |
| dc.contributor.author | Lee, KH | en_US |
| dc.contributor.author | Chen, YS | en_US |
| dc.contributor.author | Chao, CP | en_US |
| dc.contributor.author | See, YC | en_US |
| dc.contributor.author | Sun, JYC | en_US |
| dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
| dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
| dc.date.accessioned | 2014-12-08T15:40:51Z | |
| dc.date.available | 2014-12-08T15:40:51Z | |
| dc.date.issued | 2003-06-01 | en_US |
| dc.description.abstract | Small gate area with short gate length reduces the C-V distortion of ultrathin oxide devices, but results in high parasitic capacitance/total capacitance ratio. The floating well method can exclude the parasitic capacitance to obtain accurate inversion oxide thickness without using any dummy pattern. It is suitable for nano technology. | en_US |
| dc.identifier.doi | 10.1109/TED.2003.813329 | en_US |
| dc.identifier.issn | 0018-9383 | en_US |
| dc.identifier.journal | IEEE TRANSACTIONS ON ELECTRON DEVICES | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1109/TED.2003.813329 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/27845 | |
| dc.identifier.wosnumber | WOS:000184249700017 | |
| dc.language.iso | en_US | en_US |
| dc.subject | capacitance-voltage | en_US |
| dc.subject | electrical oxide thickness | en_US |
| dc.subject | floating well | en_US |
| dc.subject | nano technology | en_US |
| dc.subject | ultrathin oxide | en_US |
| dc.title | A floating well method for exact capacitance-voltage measurement of nano technology | en_US |
| dc.type | Article | en_US |