High-performance SrTiO3 MIM capacitors for analog applications
| dc.citation.epage | 2319 | en_US |
| dc.citation.issue | 9 | en_US |
| dc.citation.spage | 2312 | en_US |
| dc.citation.volume | 53 | en_US |
| dc.citation.woscount | 65 | |
| dc.contributor.author | Chiang, K. C. | en_US |
| dc.contributor.author | Huang, Ching-Chien | en_US |
| dc.contributor.author | Chen, G. L. | en_US |
| dc.contributor.author | Chen, Wen Jauh | en_US |
| dc.contributor.author | Kao, H. L. | en_US |
| dc.contributor.author | Wu, Yung-Hsien | en_US |
| dc.contributor.author | Chin, Albert | en_US |
| dc.contributor.author | McAlister, Sean P. | en_US |
| dc.contributor.department | 奈米科技中心 | zh_TW |
| dc.contributor.department | Center for Nanoscience and Technology | en_US |
| dc.date.accessioned | 2014-12-08T15:15:50Z | |
| dc.date.available | 2014-12-08T15:15:50Z | |
| dc.date.issued | 2006-09-01 | en_US |
| dc.description.abstract | TAN/SrTiO3/TaN capacitors with a capacitance density of 28-35 fF/mu m(2) have been developed by using a high-kappa (kappa = 147-169) SrTiO3 dielectric containing nanometersized microcrystals (3-10 nm). A small capacitance effective thickness was achieved by reducing the interfacial TaON using N+ treatment on the lower TaN electrode during post-deposition annealing. The small (92 ppm/V-2) voltage coefficient of the capacitance and the 3 x 10(-8) A/cm(2) leakage current at 2 V exceed the International Technology Roadmap for Semiconductors' requirements for analog capacitors at year 2018. | en_US |
| dc.identifier.doi | 10.1109/TED.2006.881013 | en_US |
| dc.identifier.issn | 0018-9383 | en_US |
| dc.identifier.journal | IEEE TRANSACTIONS ON ELECTRON DEVICES | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1109/TED.2006.881013 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/11818 | |
| dc.identifier.wosnumber | WOS:000240076500041 | |
| dc.language.iso | en_US | en_US |
| dc.subject | capacitor | en_US |
| dc.subject | International Technology Roadmap for Semiconductors (ITRS) | en_US |
| dc.subject | metal-insulator-metal (MIM) | en_US |
| dc.subject | SrTiO3 (STO) | en_US |
| dc.title | High-performance SrTiO3 MIM capacitors for analog applications | en_US |
| dc.type | Article | en_US |