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Method for gauge block measurement with the heterodyne central fringe identification technique

dc.citation.epage3186en_US
dc.citation.issue16en_US
dc.citation.spage3182en_US
dc.citation.volume49en_US
dc.citation.woscount1
dc.contributor.authorWu, Wang-Tsungen_US
dc.contributor.authorChen, Yen-Liangen_US
dc.contributor.authorHsieh, Hung-Chihen_US
dc.contributor.authorChang, Wei-Yaoen_US
dc.contributor.authorSu, Der-Chinen_US
dc.contributor.department光電工程學系zh_TW
dc.contributor.departmentDepartment of Photonicsen_US
dc.date.accessioned2014-12-08T15:06:46Z
dc.date.available2014-12-08T15:06:46Z
dc.date.issued2010-06-01en_US
dc.description.abstractIn a modified Michelson interferometer, the top face of the wringing platen is first identified using the heterodyne central fringe identification technique. Then the reference mirror located in the other arm is moved by a precision translation stage until the top face of the tested gauge block is also identified with the same technique. The displacement of the mirror is exactly equivalent to the length of the tested gauge block. The measurable range of the interferometer relates to the maximum travel range of the translation stage and its uncertainty depends on the uncertainty of the heterodyne central fringe identification method and the resolution of the translation stage. (C) 2010 Optical Society of Americaen_US
dc.identifier.doi10.1364/AO.49.003182en_US
dc.identifier.issn0003-6935en_US
dc.identifier.journalAPPLIED OPTICSen_US
dc.identifier.urihttp://dx.doi.org/10.1364/AO.49.003182en_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/5314
dc.identifier.wosnumberWOS:000278265600026
dc.language.isoen_USen_US
dc.titleMethod for gauge block measurement with the heterodyne central fringe identification techniqueen_US
dc.typeArticleen_US

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