Skip to main content
Log In
Communities & Collections
All of DSpace
Statistics
Home
學術出版;;Publications
期刊論文;;Articles
EFFECT OF HYDROGEN ON DEPOSITION OF TANTALUM NITRIDE THIN-FILMS FROM ETHYLIMIDOTANTALUM COMPLEX
EFFECT OF HYDROGEN ON DEPOSITION OF TANTALUM NITRIDE THIN-FILMS FROM ETHYLIMIDOTANTALUM COMPLEX
Loading...
Date
1992-05-01
Authors
CHIU, HT
CHANG, WP
Journal Title
Journal ISSN
Volume Title
Publisher
DOI
10.1007/BF00728611
Abstract
Description
Keywords
Citation
URI
http://dx.doi.org/10.1007/BF00728611
https://ir.lib.nycu.edu.tw/handle/11536/3448
Collections
期刊論文;;Articles
Endorsement
Review
Supplemented By
Referenced By
Full item page
