嵌附式減光型相移圖罩之模擬與製備

dc.contributor.author	龍文安	en_US
dc.contributor.author	Loong Wen-an	en_US
dc.contributor.department	交通大學應用化學系	zh_TW
dc.date.accessioned	2014-12-13T10:36:53Z
dc.date.available	2014-12-13T10:36:53Z
dc.date.issued	1999	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.identifier.govdoc	NSC88-2215-E009-025	zh_TW
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=418240&docId=74198	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/94241
dc.language.iso	zh_TW	en_US
dc.subject	相移光罩	zh_TW
dc.subject	活性離子蝕刻	zh_TW
dc.subject	電子束	zh_TW
dc.subject	微影術	zh_TW
dc.subject	步進機	zh_TW
dc.subject	Phase shift mask (PSM)	en_US
dc.subject	Reactive ion etching (RIE)	en_US
dc.subject	E-beam	en_US
dc.subject	Lithography	en_US
dc.subject	Stepper	en_US
dc.title	嵌附式減光型相移圖罩之模擬與製備	zh_TW
dc.title	Simulation and Fabrication of Embedded Attenuated Phase-Shifting Mask	en_US
dc.type	Plan	en_US

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