Metal loaded zeolite adsorbents for phosphine removal

Abstract

Phosphine (PH3) is a highly toxic air pollutant commonly used in the semiconductor and optoelectronic industries, but it has received less research attention due to its handling difficulty. In this study, metal (Cu, Zn, or Mn) loaded ZSM-5 and Y zeolite adsorbents are first prepared for the adsorption of PH3 toxic gas. The physical and chemical properties of the adsorbents which influence the PH3 adsorption capacity are analyzed. The results show that >99% PH3 adsorption efficiency is achieved when zeolites are loaded with Cu. The maximal PH3 adsorption capacities are about the same for both zeolites at 1.9 mol of PH3/mol of CU, which occurs at similar Cu loaded mass of 3.0-3.5%, beyond which the decrease in specific surface area is the major factor responsible for the decrease of PH3 adsorption capacity. The maximum adsorption capacity per loaded metal mass is much higher than literature data using CuO only for adsorbing hydride gases.