多腔式半導體製程設備之物件導向即時模擬控制系統
| dc.contributor.author | 陳傑 | en_US |
| dc.contributor.department | 交通大學機械工程系 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:31:55Z | |
| dc.date.available | 2014-12-13T10:31:55Z | |
| dc.date.issued | 2000 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC89-2212-E009-046 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=501416&docId=90421 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/91230 | |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 半導體製程設備 | zh_TW |
| dc.subject | 多腔式製程設備 | zh_TW |
| dc.subject | 物件導向模型 | zh_TW |
| dc.subject | 物件導向設計 | zh_TW |
| dc.subject | 即時軟體硬體迴路模擬 | zh_TW |
| dc.subject | Semiconductor manufacturing equipment | en_US |
| dc.subject | Cluster tool | en_US |
| dc.subject | Object oriented modeling | en_US |
| dc.subject | Object oriented design | en_US |
| dc.subject | Real time software | en_US |
| dc.subject | Hardware in the loop simulation | en_US |
| dc.title | 多腔式半導體製程設備之物件導向即時模擬控制系統 | zh_TW |
| dc.title | Object-Oriented Real-time Control System Simulator for Cluster Tools Semiconductor Equipment | en_US |
| dc.type | Plan | en_US |