多腔式半導體製程設備之物件導向即時模擬控制系統

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892212E009046.pdf (79.09 KB)

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Keywords

半導體製程設備 , 多腔式製程設備 , 物件導向模型 , 物件導向設計 , 即時軟體硬體迴路模擬 , Semiconductor manufacturing equipment , Cluster tool , Object oriented modeling , Object oriented design , Real time software , Hardware in the loop simulation

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https://www.grb.gov.tw/search/planDetail?id=501416&docId=90421
https://ir.lib.nycu.edu.tw/handle/11536/91230

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