SUPERIOR CHARACTERISTICS OF NITRIDIZED THERMAL OXIDE GROWN ON POLYCRYSTALLINE SILICON
| dc.citation.epage | 167 | en_US |
| dc.citation.issue | 2 | en_US |
| dc.citation.spage | 165 | en_US |
| dc.citation.volume | 48 | en_US |
| dc.citation.woscount | 4 | |
| dc.contributor.author | CHEN, CF | en_US |
| dc.contributor.author | WU, CY | en_US |
| dc.contributor.department | 交大名義發表 | zh_TW |
| dc.contributor.department | 工學院 | zh_TW |
| dc.contributor.department | National Chiao Tung University | en_US |
| dc.contributor.department | College of Engineering | en_US |
| dc.date.accessioned | 2014-12-08T15:06:12Z | |
| dc.date.available | 2014-12-08T15:06:12Z | |
| dc.date.issued | 1986-01-13 | en_US |
| dc.identifier.doi | 10.1063/1.97029 | en_US |
| dc.identifier.issn | 0003-6951 | en_US |
| dc.identifier.journal | APPLIED PHYSICS LETTERS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1063/1.97029 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/4771 | |
| dc.identifier.wosnumber | WOS:A1986AXV0300029 | |
| dc.language.iso | en_US | en_US |
| dc.title | SUPERIOR CHARACTERISTICS OF NITRIDIZED THERMAL OXIDE GROWN ON POLYCRYSTALLINE SILICON | en_US |
| dc.type | Article | en_US |
Files
License bundle
1 - 1 of 1
Loading...
- Name:
- license.txt
- Size:
- 1.71 KB
- Format:
- Item-specific license agreed to upon submission
- Description: