電極/鐵電薄膜/結緣層/矽晶體結構之薄膜製程及特性劣化研究
| dc.contributor.author | 陳三元 | en_US |
| dc.contributor.author | CHEN SAN-YUAN | en_US |
| dc.contributor.department | 國立交通大學材料科學與工程學系 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:39:51Z | |
| dc.date.available | 2014-12-13T10:39:51Z | |
| dc.date.issued | 2001 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC90-2215-E009-061 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=665675&docId=126367 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/96874 | |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 電極 | zh_TW |
| dc.subject | 鐵電薄膜 | zh_TW |
| dc.subject | 絕緣層 | zh_TW |
| dc.subject | 矽晶體 | zh_TW |
| dc.subject | 特性劣化 | zh_TW |
| dc.subject | Electrode | en_US |
| dc.subject | Ferroelectric thin film | en_US |
| dc.subject | Insulating layer | en_US |
| dc.subject | Silicon crystal | en_US |
| dc.subject | Characterization degradation | en_US |
| dc.title | 電極/鐵電薄膜/結緣層/矽晶體結構之薄膜製程及特性劣化研究 | zh_TW |
| dc.title | Characteristic Degradation and Processing Development of Ferroelectric-Film for Metal-Ferroelectric-Insulator-Semiconductor | en_US |
| dc.type | Plan | en_US |
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