Nanomechanical characteristics of BaxSr1-xTiO3 thin films
| dc.citation.epage | 284 | en_US |
| dc.citation.issue | 1-3 | en_US |
| dc.citation.spage | 281 | en_US |
| dc.citation.volume | 131 | en_US |
| dc.citation.woscount | 9 | |
| dc.contributor.author | Jian, Sheng-Rui | en_US |
| dc.contributor.author | Chang, Win-Jin | en_US |
| dc.contributor.author | Fang, Te-Hua | en_US |
| dc.contributor.author | Ji, Liang-Wen | en_US |
| dc.contributor.author | Hsiao, Yu-Jen | en_US |
| dc.contributor.author | Chang, Yee-Shin | en_US |
| dc.contributor.department | 電子物理學系 | zh_TW |
| dc.contributor.department | Department of Electrophysics | en_US |
| dc.date.accessioned | 2014-12-08T15:16:11Z | |
| dc.date.available | 2014-12-08T15:16:11Z | |
| dc.date.issued | 2006-07-15 | en_US |
| dc.description.abstract | The nanomechanical properties of barium strontium titanate (BaxSr1-xTiO3, x=0-1) deposited on a silicon substrate were investigated using the metalorganic deposition method. The characteristics of the BaxSr1-xTiO3 thin film's crystalline structure and surface roughness were achieved by means of X-ray diffraction (XRD) and atomic force microscopy (AFM). The results indicated that as the Ba content was decreased and therefore the Sr content was increased a lower leakage current density and a smaller grain size were obtained. Also the mechanical properties such as hardness, Young's modulus and contact stress-strain were also studied by nanoindentation. (c) 2006 Elsevier B.V. All rights reserved. | en_US |
| dc.identifier.doi | 10.1016/j.mseb.2006.03.025 | en_US |
| dc.identifier.issn | 0921-5107 | en_US |
| dc.identifier.journal | MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1016/j.mseb.2006.03.025 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/12028 | |
| dc.identifier.wosnumber | WOS:000239289100051 | |
| dc.language.iso | en_US | en_US |
| dc.subject | BST | en_US |
| dc.subject | XRD | en_US |
| dc.subject | AFM | en_US |
| dc.title | Nanomechanical characteristics of BaxSr1-xTiO3 thin films | en_US |
| dc.type | Article | en_US |