Mechanical and optical properties of ITO films with anti-reflective and anti-wear coatings
| dc.citation.epage | 102 | en_US |
| dc.citation.issue | 1 | en_US |
| dc.citation.spage | 96 | en_US |
| dc.citation.volume | 115 | en_US |
| dc.citation.woscount | 21 | |
| dc.contributor.author | Wu, WF | en_US |
| dc.contributor.author | Chiou, BS | en_US |
| dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
| dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
| dc.date.accessioned | 2014-12-08T15:01:49Z | |
| dc.date.available | 2014-12-08T15:01:49Z | |
| dc.date.issued | 1997-05-01 | en_US |
| dc.description.abstract | In this study, radio frequency (rf) magnetron sputtered ITO films were coated with reactively sputtered SiO2 films. The microhardness, pull-off strength, scratch adhesion strength, optical transmittance and reflectance of the SiO1/ITO/substrate system are investigated. Coating of SiO2 enhances both the hardness and pull-off strength and reduces the scratch critical load of the system. The optical transmittance in the visible range is also improved with the addition of SiO2. | en_US |
| dc.identifier.issn | 0169-4332 | en_US |
| dc.identifier.journal | APPLIED SURFACE SCIENCE | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/577 | |
| dc.identifier.wosnumber | WOS:A1997WX17800013 | |
| dc.language.iso | en_US | en_US |
| dc.title | Mechanical and optical properties of ITO films with anti-reflective and anti-wear coatings | en_US |
| dc.type | Article | en_US |