A REVOLVING RETRO-REFLECTIVE MARKER FOR AN OPTICAL TACHOMETER

dc.citation.epage	207	en_US
dc.citation.issue	3	en_US
dc.citation.spage	203	en_US
dc.citation.volume	24	en_US
dc.citation.woscount	7
dc.contributor.author	WENG, PK	en_US
dc.contributor.author	SHIE, JS	en_US
dc.contributor.department	交大名義發表	zh_TW
dc.contributor.department	光電工程學系	zh_TW
dc.contributor.department	National Chiao Tung University	en_US
dc.contributor.department	Department of Photonics	en_US
dc.date.accessioned	2014-12-08T15:05:30Z
dc.date.available	2014-12-08T15:05:30Z
dc.date.issued	1990-09-01	en_US
dc.description.abstract	A new tachometric marker with a surface consisting of right-angle V grooves has been made by the silicon micromachining technique. Anisotropic etching on a (001) silicon surface by three conventional recipes has been adopted. The results of the etched qualities are compared; hydrazine hydrate and potassium hydroxide-isopropanol-water solutions can give good quality right-angle V grooves. The revolving retro-reflection effect associated with this marker is described. When placed on a rotating plane, it can be utilized for wide-angle and remote tachometric measurements, where proximity measurements are either impossible or dangerous.	en_US
dc.identifier.issn	0924-4247	en_US
dc.identifier.journal	SENSORS AND ACTUATORS A-PHYSICAL	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/4022
dc.identifier.wosnumber	WOS:A1990EP57100006
dc.language.iso	en_US	en_US
dc.title	A REVOLVING RETRO-REFLECTIVE MARKER FOR AN OPTICAL TACHOMETER	en_US
dc.type	Article	en_US

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