INHIBITION OF BIRDS BEAK IN LOCOS BY NEW BUFFER N2O OXIDE
| dc.citation.epage | 324 | en_US |
| dc.citation.issue | 4 | en_US |
| dc.citation.spage | 323 | en_US |
| dc.citation.volume | 31 | en_US |
| dc.citation.woscount | 0 | |
| dc.contributor.author | CHAO, TS | en_US |
| dc.contributor.author | CHENG, JY | en_US |
| dc.contributor.author | LEI, TF | en_US |
| dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
| dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
| dc.date.accessioned | 2014-12-08T15:03:31Z | |
| dc.date.available | 2014-12-08T15:03:31Z | |
| dc.date.issued | 1995-02-16 | en_US |
| dc.description.abstract | In the Letter new N2O buffer oxide was used to replace the conventional dry oxide for LOGOS isolation. This new structure can result in a shorter bird's beak than the conventional structure without adding extra steps and inducing the defect in silicon substrate. | en_US |
| dc.identifier.doi | 10.1049/el:19950208 | en_US |
| dc.identifier.issn | 0013-5194 | en_US |
| dc.identifier.journal | ELECTRONICS LETTERS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1049/el:19950208 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/2047 | |
| dc.identifier.wosnumber | WOS:A1995QL56400057 | |
| dc.language.iso | en_US | en_US |
| dc.subject | SILICON | en_US |
| dc.subject | OXIDATION | en_US |
| dc.title | INHIBITION OF BIRDS BEAK IN LOCOS BY NEW BUFFER N2O OXIDE | en_US |
| dc.type | Article | en_US |