應用DSMC法模擬分析深次微米銅化學氣相沈積之熱流場及沈積度
| dc.contributor.author | 陳俊勳 | en_US |
| dc.contributor.author | CHIUN-HSUNCHEN | en_US |
| dc.contributor.department | 交通大學機械工程系 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:36:30Z | |
| dc.date.available | 2014-12-13T10:36:30Z | |
| dc.date.issued | 2000 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC89-2212-E009-024 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=501393&docId=90414 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/93982 | |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 直接模擬蒙地卡羅法 | zh_TW |
| dc.subject | 銅化學氣相沈積 | zh_TW |
| dc.subject | 渠溝 | zh_TW |
| dc.subject | DSMC method | en_US |
| dc.subject | Cu chemical vapor deposition | en_US |
| dc.subject | Trench | en_US |
| dc.title | 應用DSMC法模擬分析深次微米銅化學氣相沈積之熱流場及沈積度 | zh_TW |
| dc.title | Using DSMC to Simulate Thermal-Flow Field on Deep Naro-meter Trench for Cu-CVD | en_US |
| dc.type | Plan | en_US |