多軸觸覺式感測器之研究(II)
| dc.contributor.author | 黃宇中 | en_US |
| dc.contributor.author | HUANG YU-CHUNG | en_US |
| dc.contributor.department | 交通大學電子工程系 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:37:03Z | |
| dc.date.available | 2014-12-13T10:37:03Z | |
| dc.date.issued | 1999 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC88-2218-E009-014 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=418622&docId=74286 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/94344 | |
| dc.language.iso | zh_TW | en_US |
| dc.subject | 觸覺感測器 | zh_TW |
| dc.subject | 微機電系統 | zh_TW |
| dc.subject | 多軸式 | zh_TW |
| dc.subject | 溼式蝕刻 | zh_TW |
| dc.subject | 前置蝕刻 | zh_TW |
| dc.subject | Tactile sensor | en_US |
| dc.subject | MEMS | en_US |
| dc.subject | Multi-axial | en_US |
| dc.subject | Wet etching | en_US |
| dc.subject | Pre-etching | en_US |
| dc.title | 多軸觸覺式感測器之研究(II) | zh_TW |
| dc.title | A Study of Multi-Axial Tactile Sensors (II) | en_US |
| dc.type | Plan | en_US |