Thickness effects on the electrical characteristics of Ba0.7Sr0.3TiO3 capacitors with nano-Cr interlayer
| dc.citation.epage | en_US | |
| dc.citation.issue | 13 | en_US |
| dc.citation.volume | 90 | en_US |
| dc.citation.woscount | 7 | |
| dc.contributor.author | Ho, Chia-Cheng | en_US |
| dc.contributor.author | Chiou, Bi-Shiou | en_US |
| dc.contributor.author | Chang, Li-Chun | en_US |
| dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
| dc.contributor.department | Innovative Packaging Research Center | zh_TW |
| dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
| dc.contributor.department | Innovative Packaging Research Center | en_US |
| dc.date.accessioned | 2014-12-08T15:14:27Z | |
| dc.date.available | 2014-12-08T15:14:27Z | |
| dc.date.issued | 2007-03-26 | en_US |
| dc.description.abstract | A multilayer Ba0.7Sr0.3TiO3/Cr/Ba0.7Sr0.3TiO3 (BST/Cr/BST) structure was sputtered sequentially onto Pt/Ti/SiO2/Si substrate. With the insertion of a 2 nm Cr interlayer, the temperature coefficient of capacitance of the BST/Cr/BST dielectric is about 69% lower than that of BST monolayer dielectric. The dielectric constant and dissipation factor as the function of Cr thickness are studied. X-ray diffraction patterns, the analysis results of energy dispersive spectroscopy, and the survey scan profiles of Auger electron spectroscopy reveal the formation of a TiO2 secondary phase after the multilayer is annealed at 800 degrees C in O-2 atmosphere. The insertion of nano-Cr interlayer improves the electrical properties of BST capacitors. (c) 2007 American Institute of Physics. | en_US |
| dc.identifier.doi | 10.1063/1.2717553 | en_US |
| dc.identifier.issn | 0003-6951 | en_US |
| dc.identifier.journal | APPLIED PHYSICS LETTERS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1063/1.2717553 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/11005 | |
| dc.identifier.wosnumber | WOS:000245317100077 | |
| dc.language.iso | en_US | en_US |
| dc.title | Thickness effects on the electrical characteristics of Ba0.7Sr0.3TiO3 capacitors with nano-Cr interlayer | en_US |
| dc.type | Article | en_US |