Fabrication of Antireflective Sub-Wavelength Structures on Silicon Nitride Using Nano Cluster Mask for Solar Cell Application
| dc.citation.epage | 683 | en_US |
| dc.citation.issue | 7 | en_US |
| dc.citation.spage | 680 | en_US |
| dc.citation.volume | 4 | en_US |
| dc.citation.woscount | 26 | |
| dc.contributor.author | Sahoo, Kartika Chandra | en_US |
| dc.contributor.author | Lin, Men-Ku | en_US |
| dc.contributor.author | Chang, Edward-Yi | en_US |
| dc.contributor.author | Lu, Yi-Yao | en_US |
| dc.contributor.author | Chen, Chun-Chi | en_US |
| dc.contributor.author | Huang, Jin-Hua | en_US |
| dc.contributor.author | Chang, Chun-Wei | en_US |
| dc.contributor.department | 材料科學與工程學系 | zh_TW |
| dc.contributor.department | Department of Materials Science and Engineering | en_US |
| dc.date.accessioned | 2014-12-08T15:09:12Z | |
| dc.date.available | 2014-12-08T15:09:12Z | |
| dc.date.issued | 2009-07-01 | en_US |
| dc.description.abstract | We have developed a simple and scalable approach for fabricating sub-wavelength structures (SWS) on silicon nitride by means of self-assembled nickel nanoparticle masks and inductively coupled plasma (ICP) ion etching. Silicon nitride SWS surfaces with diameter of 160-200 nm and a height of 140-150 nm were obtained. A low reflectivity below 1% was observed over wavelength from 590 to 680 nm. Using the measured reflectivity data in PC1D, the solar cell characteristics has been compared for single layer anti-reflection (SLAR) coatings and SWS and a 0.8% improvement in efficiency has been seen. | en_US |
| dc.identifier.doi | 10.1007/s11671-009-9297-7 | en_US |
| dc.identifier.issn | 1931-7573 | en_US |
| dc.identifier.journal | NANOSCALE RESEARCH LETTERS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1007/s11671-009-9297-7 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/7020 | |
| dc.identifier.wosnumber | WOS:000266584900013 | |
| dc.language.iso | en_US | en_US |
| dc.subject | Sub-wavelength Structure | en_US |
| dc.subject | Solar cell | en_US |
| dc.subject | SWS fabrication | en_US |
| dc.subject | Reflectance | en_US |
| dc.subject | Anti-reflective coatings | en_US |
| dc.title | Fabrication of Antireflective Sub-Wavelength Structures on Silicon Nitride Using Nano Cluster Mask for Solar Cell Application | en_US |
| dc.type | Article | en_US |