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12吋矽晶圓半導體CVD製程設備及BST介電薄膜成長研究---子計畫I:12吋矽晶圓CVD製程設備的加熱及成長BST薄膜之進氣系統設計與反應爐系統整合(III)

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2002

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https://www.grb.gov.tw/search/planDetail?id=783002&docId=150397
 https://ir.lib.nycu.edu.tw/handle/11536/92872

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研究計畫;;Research Plans

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