Characterization of one-dimension edge roughness from far-field irradiance at subwavelength-scale precision
| dc.citation.epage | 2001 | en_US |
| dc.citation.issue | 8 | en_US |
| dc.citation.spage | 1997 | en_US |
| dc.citation.volume | 281 | en_US |
| dc.citation.woscount | 2 | |
| dc.contributor.author | Chu, Shu-Chun | en_US |
| dc.contributor.author | Chern, Jyh-Long | en_US |
| dc.contributor.department | 光電工程學系 | zh_TW |
| dc.contributor.department | Department of Photonics | en_US |
| dc.date.accessioned | 2014-12-08T15:12:18Z | |
| dc.date.available | 2014-12-08T15:12:18Z | |
| dc.date.issued | 2008-04-15 | en_US |
| dc.description.abstract | It is proposed and numerically verified that the one-dimensional edge roughness of test sample can be characterized by far-field irradiance measurement at subwavelength-scale precision with a constructed aperture playing as an optical ruler. The precision of the proposed scheme of measurement could be better than 3%, even when the edge roughness is in subwavelength-scale. The influence of sample thickness on the proposed measurement scheme is also investigated and considered. (C) 2007 Elsevier B.V. All rights reserved. | en_US |
| dc.identifier.doi | 10.1016/j.optcom.2007.12.032 | en_US |
| dc.identifier.issn | 0030-4018 | en_US |
| dc.identifier.journal | OPTICS COMMUNICATIONS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1016/j.optcom.2007.12.032 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/9450 | |
| dc.identifier.wosnumber | WOS:000254566000015 | |
| dc.language.iso | en_US | en_US |
| dc.subject | diffraction | en_US |
| dc.subject | subwavelength | en_US |
| dc.subject | measurement | en_US |
| dc.title | Characterization of one-dimension edge roughness from far-field irradiance at subwavelength-scale precision | en_US |
| dc.type | Article | en_US |