微影步進機之IDM定位機構實作---子計畫III：加速規式之位置、磨擦力感測器在二維衝量馬達伺服控制中之應用(I)
| dc.contributor.author | 陳宗麟 | en_US |
| dc.contributor.author | Chen Tsung-Lin | en_US |
| dc.contributor.department | 國立交通大學機械工程學系 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:33:21Z | |
| dc.date.available | 2014-12-13T10:33:21Z | |
| dc.date.issued | 2003 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC92-2212-E009-025 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=877060&docId=168254 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/92012 | |
| dc.language.iso | zh_TW | en_US |
| dc.title | 微影步進機之IDM定位機構實作---子計畫III：加速規式之位置、磨擦力感測器在二維衝量馬達伺服控制中之應用(I) | zh_TW |
| dc.title | 2D Impact-Drive-Mechanism Drives Servo Control Using Accelerometer-Based Position Sensors and Friction Sensors (I) | en_US |
| dc.type | Plan | en_US |