Electroplated Ni-CNT Nanocomposite for Micromechanical Resonator Applications
| dc.citation.epage | 872 | en_US |
| dc.citation.issue | 6 | en_US |
| dc.citation.volume | 33 | en_US |
| dc.citation.woscount | 0 | |
| dc.contributor.author | Lee, Yi-Chia | en_US |
| dc.contributor.author | Li, Ming-Huang | en_US |
| dc.contributor.author | Cheng, Y. T. | en_US |
| dc.contributor.author | Hsu, Wensyang | en_US |
| dc.contributor.author | Li, Sheng-Shian | en_US |
| dc.contributor.department | 機械工程學系 | zh_TW |
| dc.contributor.department | 電子工程學系及電子研究所 | zh_TW |
| dc.contributor.department | Department of Mechanical Engineering | en_US |
| dc.contributor.department | Department of Electronics Engineering and Institute of Electronics | en_US |
| dc.date.accessioned | 2014-12-08T15:23:36Z | |
| dc.date.available | 2014-12-08T15:23:36Z | |
| dc.date.issued | 2012-06-01 | en_US |
| dc.description.abstract | In this letter, electroplated Ni-CNT nanocomposite is synthesized and utilized as a structural material for micromechanical resonator fabrication. Pretreated by sulfate sodium dodecyl, carbon nanotubes (CNTs) disperse well in electrolyte and can be incorporated in an electroplated Ni film. Clamped-clamped beam resonators fabricated using the nanocomposite show similar to 27% resonant frequency enhancement (from 498.75 to 634.72 kHz). Meanwhile, the Q factors of 781 and 760 for Ni and Ni-CNT nanocomposite resonators, which are comparable with the prior art, indicate that the anchor loss could dominate the Q performance of the beam resonators. | en_US |
| dc.identifier.issn | 0741-3106 | en_US |
| dc.identifier.journal | IEEE ELECTRON DEVICE LETTERS | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/16498 | |
| dc.identifier.wosnumber | WOS:000305835000044 | |
| dc.language.iso | en_US | en_US |
| dc.subject | Electroplated Ni-CNT nanocomposite | en_US |
| dc.subject | microelectromechanical systems (MEMS) | en_US |
| dc.subject | quality factor | en_US |
| dc.subject | resonant frequency | en_US |
| dc.subject | resonator | en_US |
| dc.title | Electroplated Ni-CNT Nanocomposite for Micromechanical Resonator Applications | en_US |
| dc.type | Article | en_US |