Electrical Performance Enhancement of AlZn-SnO Thin Film Transistor by Supercritical Fluid Treatment
| dc.citation.epage | 1156 | en_US |
| dc.citation.issue | 9 | en_US |
| dc.citation.spage | 1154 | en_US |
| dc.citation.volume | 34 | en_US |
| dc.citation.woscount | 1 | |
| dc.contributor.author | Teng, Li-Feng | en_US |
| dc.contributor.author | Liu, Po-Tsun | en_US |
| dc.contributor.author | Wang, Wei-Ya | en_US |
| dc.contributor.department | 光電工程學系 | zh_TW |
| dc.contributor.department | 顯示科技研究所 | zh_TW |
| dc.contributor.department | Department of Photonics | en_US |
| dc.contributor.department | Institute of Display | en_US |
| dc.date.accessioned | 2014-12-08T15:32:31Z | |
| dc.date.available | 2014-12-08T15:32:31Z | |
| dc.date.issued | 2013-09-01 | en_US |
| dc.description.abstract | In this letter, a low-temperature supercritical fluid (SCF) treatment was employed to enhance the electrical and optical properties of amorphous Al-Zn-Sn-O thin film transistors (a-AZTO TFTs) for flat-panel displays. The carrier mobility and threshold voltage of a-AZTO TFT were improved significantly after SCF process because of the reduction of trap density in the a-AZTO active layer. In addition, the SCF-treated a-AZTO TFT exhibited superior electrical reliability and less degradation after negative gate bias illumination stress. X-ray photoelectron spectroscopy analysis confirmed that the proposed SCF treatment could effectively oxidize a-AZTO film and change the oxidation states of Sn, resulting in the improvement of a-AZTO TFT device characteristics. | en_US |
| dc.identifier.doi | 10.1109/LED.2013.2272117 | en_US |
| dc.identifier.issn | 0741-3106 | en_US |
| dc.identifier.journal | IEEE ELECTRON DEVICE LETTERS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1109/LED.2013.2272117 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/22783 | |
| dc.identifier.wosnumber | WOS:000323982500027 | |
| dc.language.iso | en_US | en_US |
| dc.subject | Al-Zn-Sn-O thin film transistor (Al-Zn-Sn-O TFT) | en_US |
| dc.subject | supercritical fluid (SCF) | en_US |
| dc.subject | transparent amorphous oxide semiconductor (TAOS) | en_US |
| dc.title | Electrical Performance Enhancement of AlZn-SnO Thin Film Transistor by Supercritical Fluid Treatment | en_US |
| dc.type | Article | en_US |