高透射率嵌附層、唯相移層、極短紫外光反射式圖罩吸收層與緩衝層之材料、電漿蝕刻與性質探討(I)

Files

922215E009066.pdf (360.89 KB)

Date

Authors

URI

https://www.grb.gov.tw/search/planDetail?id=873559&docId=167362
https://ir.lib.nycu.edu.tw/handle/11536/92165

Collections

研究計畫;;Research Plans