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Transparent ZnO thin film transistor fabricated by sol-gel and chemical bath deposition combination method

dc.citation.epageen_US
dc.citation.issue1en_US
dc.citation.volume90en_US
dc.citation.woscount104
dc.contributor.authorCheng, Hua-Chien_US
dc.contributor.authorChen, Chia-Fuen_US
dc.contributor.authorTsay, Chien-Yieen_US
dc.contributor.department材料科學與工程學系zh_TW
dc.contributor.departmentDepartment of Materials Science and Engineeringen_US
dc.date.accessioned2014-12-08T15:14:57Z
dc.date.available2014-12-08T15:14:57Z
dc.date.issued2007-01-01en_US
dc.description.abstractTop-gate thin film transistors with n-type ZnO active channel were performed under 230 degrees C. Especially, ZnO film was deposited by a combined method of sol-gel and chemical bath deposition without any preactivation for film growth. Silicon nitride and indium tin oxide were used as the gate insulator and the conducting electrodes (source, drain, and gate). These transistors were highly transparent in the visible spectrum, with transmittance as high as 75% to approximately 85% at wavelength from 500 to 700 nm. The optimum device has field-effect mobility of 0.67 cm(2)/V s and an on-off ratio more than 10(7).en_US
dc.identifier.doi10.1063/1.2404590en_US
dc.identifier.issn0003-6951en_US
dc.identifier.journalAPPLIED PHYSICS LETTERSen_US
dc.identifier.urihttp://dx.doi.org/10.1063/1.2404590en_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/11243
dc.identifier.wosnumberWOS:000243379900049
dc.language.isoen_USen_US
dc.titleTransparent ZnO thin film transistor fabricated by sol-gel and chemical bath deposition combination methoden_US
dc.typeArticleen_US

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