Diamond-shaped microplasma device using thick photoresist as a barrier rib in Ne-Ar gas mixtures
| dc.citation.epage | 1243 | en_US |
| dc.citation.issue | 4 | en_US |
| dc.citation.spage | 1242 | en_US |
| dc.citation.volume | 36 | en_US |
| dc.citation.woscount | 0 | |
| dc.contributor.author | Kim, Sung-O | en_US |
| dc.contributor.department | 光電工程學系 | zh_TW |
| dc.contributor.department | 顯示科技研究所 | zh_TW |
| dc.contributor.department | Department of Photonics | en_US |
| dc.contributor.department | Institute of Display | en_US |
| dc.date.accessioned | 2014-12-08T15:11:09Z | |
| dc.date.available | 2014-12-08T15:11:09Z | |
| dc.date.issued | 2008-08-01 | en_US |
| dc.description.abstract | The discharge characteristics of the diamond-shaped microplasma devices with pure neon, neon-1% argon, and neon-5% argon gas mixtures are investigated. The 5 x 5 arrays of diamond-shaped microplasma devices operating at pressures from 300 to 800 torr have been characterized. The diamond-shaped microplasma devices, offer advantages such as having a high yield process, low ignition voltage, stable glow discharge, and low cost. The electrical properties of neon discharges have been examined with different argon fractions. The diamond-shaped microplasma device operates at voltages as low as 190 V, at 800 torr. | en_US |
| dc.identifier.doi | 10.1109/TPS.2008.922936 | en_US |
| dc.identifier.issn | 0093-3813 | en_US |
| dc.identifier.journal | IEEE TRANSACTIONS ON PLASMA SCIENCE | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1109/TPS.2008.922936 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/8544 | |
| dc.identifier.wosnumber | WOS:000258618200191 | |
| dc.language.iso | en_US | en_US |
| dc.subject | glow discharge | en_US |
| dc.subject | microdischarge | en_US |
| dc.title | Diamond-shaped microplasma device using thick photoresist as a barrier rib in Ne-Ar gas mixtures | en_US |
| dc.type | Article | en_US |