Epitaxial growth of titanium oxycarbide on MgO (001) substrates by pulsed laser deposition
| dc.citation.epage | 2994 | en_US |
| dc.citation.issue | 7 | en_US |
| dc.citation.spage | 2990 | en_US |
| dc.citation.volume | 257 | en_US |
| dc.citation.woscount | 3 | |
| dc.contributor.author | Do, Hien | en_US |
| dc.contributor.author | Yen, Tzu-Chun | en_US |
| dc.contributor.author | Tian, Chih-Sheng | en_US |
| dc.contributor.author | Wu, Yue-Han | en_US |
| dc.contributor.author | Chang, Li | en_US |
| dc.contributor.department | 材料科學與工程學系 | zh_TW |
| dc.contributor.department | Department of Materials Science and Engineering | en_US |
| dc.date.accessioned | 2014-12-08T15:37:38Z | |
| dc.date.available | 2014-12-08T15:37:38Z | |
| dc.date.issued | 2011-01-15 | en_US |
| dc.description.abstract | Epitaxial TiC(x)O(y) thin films were grown on MgO (0 0 1) substrates by using pulsed laser deposition method. High-resolution X-ray diffraction and transmission electron microscopy were used to examine crystallinity and microstructure of epitaxial TiC(x)O(y) film on MgO. The chemical composition of the film is determined to be x similar to 0.47 and y similar to 0.69 by X-ray photoelectron spectroscopy. Atomic force microscopy revealed that the surface of TiC(x)O(y) film is very smooth with roughness of 0.18 nm. The resistivity of the TiC(x)O(y) film measured by four-point-probe method was about 137 mu Omega cm. (C) 2010 Elsevier B.V. All rights reserved. | en_US |
| dc.identifier.doi | 10.1016/j.apsusc.2010.10.105 | en_US |
| dc.identifier.issn | 0169-4332 | en_US |
| dc.identifier.journal | APPLIED SURFACE SCIENCE | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1016/j.apsusc.2010.10.105 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/25883 | |
| dc.identifier.wosnumber | WOS:000285963200095 | |
| dc.language.iso | en_US | en_US |
| dc.subject | Titanium oxycarbide | en_US |
| dc.subject | Epitaxial growth | en_US |
| dc.subject | Pulsed laser deposition | en_US |
| dc.title | Epitaxial growth of titanium oxycarbide on MgO (001) substrates by pulsed laser deposition | en_US |
| dc.type | Article | en_US |