Surface roughness measurement on microchannels by atomic force microscopy using a bent tapered fiber probe
| dc.citation.epage | 3954 | en_US |
| dc.citation.issue | 10 | en_US |
| dc.citation.spage | 3953 | en_US |
| dc.citation.volume | 71 | en_US |
| dc.citation.woscount | 4 | |
| dc.contributor.author | Chen, SH | en_US |
| dc.contributor.author | Lin, HN | en_US |
| dc.contributor.author | Yang, CR | en_US |
| dc.contributor.department | 電子物理學系 | zh_TW |
| dc.contributor.department | Department of Electrophysics | en_US |
| dc.date.accessioned | 2014-12-08T15:44:45Z | |
| dc.date.available | 2014-12-08T15:44:45Z | |
| dc.date.issued | 2000-10-01 | en_US |
| dc.description.abstract | We demonstrate a high-resolution and nondestructive surface roughness measurement on microchannels by atomic force microscopy with the use of a bent tapered optical fiber probe. The probe was fabricated by a combination of laser heating-pulling and electric arc bending. Microchannels with a width of 41.5 mu m and a height of 31.9 mu m were fabricated on polycarbonate by excimer laser ablation and the resultant roughness was measured to be 4.8 nm. (C) 2000 American Institute of Physics. [S0034-6748(00)00210-0]. | en_US |
| dc.identifier.issn | 0034-6748 | en_US |
| dc.identifier.journal | REVIEW OF SCIENTIFIC INSTRUMENTS | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/30211 | |
| dc.identifier.wosnumber | WOS:000089554500058 | |
| dc.language.iso | en_US | en_US |
| dc.title | Surface roughness measurement on microchannels by atomic force microscopy using a bent tapered fiber probe | en_US |
| dc.type | Article | en_US |