快速微型化IrO/sub x/固態CO/sub 2/感測元件

Date

Authors

Keywords

快速反應 , 固態 , CO/sub2/微感測器 , 薄膜 , 濺鍍 , Fast response , Solid-state , CO2 microsensor , Thin film , Sputtering

URI

https://www.grb.gov.tw/search/planDetail?id=230108&docId=41803
https://ir.lib.nycu.edu.tw/handle/11536/95751

Collections

研究計畫;;Research Plans