快速微型化IrO/sub x/固態CO/sub 2/感測元件

dc.contributor.author	趙書琦	en_US
dc.contributor.author	Chao Shuchi	en_US
dc.contributor.department	國立交通大學電子物理學系	zh_TW
dc.date.accessioned	2014-12-13T10:38:49Z
dc.date.available	2014-12-13T10:38:49Z
dc.date.issued	1996	en_US
dc.description.sponsorship	行政院國家科學委員會	zh_TW
dc.identifier.govdoc	NSC85-2215-E009-062	zh_TW
dc.identifier.uri	https://www.grb.gov.tw/search/planDetail?id=230108&docId=41803	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/95751
dc.language.iso	zh_TW	en_US
dc.subject	快速反應	zh_TW
dc.subject	固態	zh_TW
dc.subject	CO/sub2/微感測器	zh_TW
dc.subject	薄膜	zh_TW
dc.subject	濺鍍	zh_TW
dc.subject	Fast response	en_US
dc.subject	Solid-state	en_US
dc.subject	CO2 microsensor	en_US
dc.subject	Thin film	en_US
dc.subject	Sputtering	en_US
dc.title	快速微型化IrO/sub x/固態CO/sub 2/感測元件	zh_TW
dc.title	Fast Solid-State CO/sub 2/ Microsensor Based on IrO/sub x/	en_US
dc.type	Plan	en_US

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