Thermal Stability and Performance of NbSiTaTiZr High-Entropy Alloy Barrier for Copper Metallization
| dc.citation.epage | H1165 | en_US |
| dc.citation.issue | 11 | en_US |
| dc.citation.spage | H1161 | en_US |
| dc.citation.volume | 158 | en_US |
| dc.citation.woscount | 19 | |
| dc.contributor.author | Tsai, Ming-Hung | en_US |
| dc.contributor.author | Wang, Chun-Wen | en_US |
| dc.contributor.author | Tsai, Che-Wei | en_US |
| dc.contributor.author | Shen, Wan-Jui | en_US |
| dc.contributor.author | Yeh, Jien-Wei | en_US |
| dc.contributor.author | Gan, Jon-Yiew | en_US |
| dc.contributor.author | Wu, Wen-Wei | en_US |
| dc.contributor.department | 材料科學與工程學系 | zh_TW |
| dc.contributor.department | Department of Materials Science and Engineering | en_US |
| dc.date.accessioned | 2014-12-08T15:20:50Z | |
| dc.date.available | 2014-12-08T15:20:50Z | |
| dc.date.issued | 2011 | en_US |
| dc.description.abstract | Development of better diffusion barriers for Cu metallization is one of the key issues for the microelectronics industry. Although metallic diffusion barriers offer many advantages, their application is hindered due to their inferior thermal stability relative to ceramic barriers. Here we report on a metallic diffusion barrier, NbSiTaTiZr, which shows thermal stability comparable to ceramic barriers. The outstanding performance of NbSiTaTiZr is due to its better structural and chemical stability at high temperatures. (C) 2011 The Electrochemical Society. [DOI: 10.1149/2.056111jes] All rights reserved. | en_US |
| dc.identifier.doi | 10.1149/2.056111jes | en_US |
| dc.identifier.issn | 0013-4651 | en_US |
| dc.identifier.journal | JOURNAL OF THE ELECTROCHEMICAL SOCIETY | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1149/2.056111jes | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/14828 | |
| dc.identifier.wosnumber | WOS:000295626000063 | |
| dc.language.iso | en_US | en_US |
| dc.title | Thermal Stability and Performance of NbSiTaTiZr High-Entropy Alloy Barrier for Copper Metallization | en_US |
| dc.type | Article | en_US |