Native-NMOS-triggered SCR (NANSCR) for ESD protection in 0.13-mu m CMOS integrated circuits

Abstract

A novel native-NMOS-triggered SCR (NANSCR) is proposed for efficient ESD protection design in a 0.13-mum CMOS process. As compared with the traditional LVTSCR, the trigger voltage, turn-on resistance, turn-on speed, and CDM ESD level of NANSCR have been greatly improved to protect the ultra-thin gate oxide against ESD stresses. The proposed NANSCR can be designed for the input, output, and power-rail ESD protection circuits without latchup danger in a 0.13-mum CMOS process with VDD of 1.2 V. A new whole-chip ESD protection scheme realized with the NANSCR devices has been also demonstrated with the consideration of pin-to-pin ESD zapping.