Nonconfocal Differential Interferometry Sensing Scheme for Scanning Probe Microscopy
| dc.citation.epage | en_US | |
| dc.citation.issue | 4 | en_US |
| dc.citation.volume | 50 | en_US |
| dc.citation.woscount | 0 | |
| dc.contributor.author | Lin, Yu-Cheng | en_US |
| dc.contributor.author | Cheng, Stone | en_US |
| dc.contributor.department | 機械工程學系 | zh_TW |
| dc.contributor.department | Department of Mechanical Engineering | en_US |
| dc.date.accessioned | 2014-12-08T15:11:48Z | |
| dc.date.available | 2014-12-08T15:11:48Z | |
| dc.date.issued | 2011-04-01 | en_US |
| dc.description.abstract | In this work, we describe a nonconfocal differential interferometer to detect the cantilever vibration for a scanning probe microscope. Capable of focusing the beams on the different height surfaces of a cantilever to adapt the length of commercially available cantilever chips, the proposed two-beam interferometer can maintain the sensitivity by placing a glass slip for an object beam to extend the focal length to the cantilever. An experiment involving a scanning force microscope is performed in static mode operation for applications where topography and magnetic images are presented. (C) 2011 The Japan Society of Applied Physics | en_US |
| dc.identifier.doi | 10.1143/JJAP.50.048002 | en_US |
| dc.identifier.issn | 0021-4922 | en_US |
| dc.identifier.journal | JAPANESE JOURNAL OF APPLIED PHYSICS | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1143/JJAP.50.048002 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/9044 | |
| dc.identifier.wosnumber | WOS:000289717000049 | |
| dc.language.iso | en_US | en_US |
| dc.title | Nonconfocal Differential Interferometry Sensing Scheme for Scanning Probe Microscopy | en_US |
| dc.type | Article | en_US |