Design of low-capacitance bond pad for high-frequency I/O applications in CMOS integrated circuits

Abstract

A new structure of bond pad is proposed to reduce its parasitic capacitance in a baseline CMOS process without any process modification. The proposed bond pad has a capacitance less than 50% of that in the traditional bond pad. In addition, this new bond pad also provides better bonding adhesion of 10% improvement than the traditional one. It is greatly useful for high-frequency IC's, which need a very low input capacitance.