Angle measurement using total-internal-reflection heterodyne interferometry
| dc.citation.epage | 1753 | en_US |
| dc.citation.issue | 6 | en_US |
| dc.citation.spage | 1750 | en_US |
| dc.citation.volume | 36 | en_US |
| dc.citation.woscount | 46 | en_US |
| dc.contributor.author | Chiu, MH | en_US |
| dc.contributor.author | Su, DC | en_US |
| dc.contributor.department | 光電工程研究所 | zh_TW |
| dc.contributor.department | Institute of EO Enginerring | en_US |
| dc.date.accessioned | 2019-04-03T06:38:50Z | |
| dc.date.available | 2019-04-03T06:38:50Z | |
| dc.date.issued | 1997-06-01 | en_US |
| dc.description.abstract | A new optical method for angle measurement based on total-internal-reflection heterodyne interferometry is presented. In this method, heterodyne interferometry is applied to measure the phase difference between s and p polarization states at total internal reflection. This phase difference depends on the angle of incidence. Hence, small-angle measurement can be performed only by evaluating this phase difference. The validity of the method is demonstrated, and it has a measurement range of 10 deg. Its resolution depends on the angle of incidence; the best resolution is 8x10(-5) deg. (C) 1997 Society of Photo-Optical Instrumentation Engineers. | en_US |
| dc.identifier.doi | 10.1117/1.601200 | en_US |
| dc.identifier.issn | 0091-3286 | en_US |
| dc.identifier.journal | OPTICAL ENGINEERING | en_US |
| dc.identifier.uri | http://dx.doi.org/10.1117/1.601200 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/149542 | |
| dc.identifier.wosnumber | WOS:A1997XD38800026 | en_US |
| dc.language.iso | en_US | en_US |
| dc.subject | angle measurement | en_US |
| dc.subject | total-internal-reflection effect | en_US |
| dc.subject | heterodyne interferometry | en_US |
| dc.title | Angle measurement using total-internal-reflection heterodyne interferometry | en_US |
| dc.type | Article | en_US |