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High-Performance InGaZnO Thin-Film Transistors Using HfLaO Gate Dielectric

dc.citation.epage1319en_US
dc.citation.issue12en_US
dc.citation.spage1317en_US
dc.citation.volume30en_US
dc.citation.woscount32
dc.contributor.authorSu, N. C.en_US
dc.contributor.authorWang, S. J.en_US
dc.contributor.authorChin, Alberten_US
dc.contributor.department電子工程學系及電子研究所zh_TW
dc.contributor.departmentDepartment of Electronics Engineering and Institute of Electronicsen_US
dc.date.accessioned2014-12-08T15:08:08Z
dc.date.available2014-12-08T15:08:08Z
dc.date.issued2009-12-01en_US
dc.description.abstractIn this letter, we report a low-voltage-driven amorphous indium-gallium-zinc oxide thin-film transistor with a high-k-value HfLaO gate dielectric. Good characteristics were achieved including a low V(T) of 0.22 V, small subthreshold swing of 76 mV/dec, high mobility of 25 cm(2)/V . s, and large I(on)/I(off) ratio of 5 x 10(7). These good performances are obtained at an operation voltage as low as 2 V. These characteristics are attractive for high-switching-speed and low-power applications.en_US
dc.identifier.doi10.1109/LED.2009.2033392en_US
dc.identifier.issn0741-3106en_US
dc.identifier.journalIEEE ELECTRON DEVICE LETTERSen_US
dc.identifier.urihttp://dx.doi.org/10.1109/LED.2009.2033392en_US
dc.identifier.urihttps://ir.lib.nycu.edu.tw/handle/11536/6353
dc.identifier.wosnumberWOS:000272044500023
dc.language.isoen_USen_US
dc.subjectAmorphous indium-gallium-zinc oxide (a-IGZO)en_US
dc.subjectequivalent oxide thicknessen_US
dc.subjectHfLaOen_US
dc.subjecthigh-ken_US
dc.subjectthin-film transistorsen_US
dc.titleHigh-Performance InGaZnO Thin-Film Transistors Using HfLaO Gate Dielectricen_US
dc.typeArticleen_US

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