複晶矽鍺與MILC在低溫複晶矽薄膜電晶體上之應用(III)---子計畫III：MILC低溫複晶矽薄膜電晶體之退火製程開發、新穎結構及小尺寸元件之製作及研究
| dc.contributor.author | 張俊彥 | en_US |
| dc.contributor.author | CHANG CHUN-YEN | en_US |
| dc.contributor.department | 國立交通大學電子工程學系 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:33:31Z | |
| dc.date.available | 2014-12-13T10:33:31Z | |
| dc.date.issued | 2003 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC92-2215-E009-013 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=873412&docId=167318 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/92110 | |
| dc.language.iso | zh_TW | en_US |
| dc.title | 複晶矽鍺與MILC在低溫複晶矽薄膜電晶體上之應用(III)---子計畫III：MILC低溫複晶矽薄膜電晶體之退火製程開發、新穎結構及小尺寸元件之製作及研究 | zh_TW |
| dc.title | Study of Low Temperautre MILC Poly-Si Film and Its Application on Novel Strucutre Small Dimensional TFTs | en_US |
| dc.type | Plan | en_US |