Highly sensitive nitric oxide gas sensor based on ZnO-nanorods vertical resistor operated at room temperature

Abstract

We successfully demonstrated a simple and low-cost nitric oxide (NO) gas sensor to deliver parts-per-billion (ppb) regime detection at room temperature operation. A vertical-channel ZnO nanorods resistor is fabricated by putting silver nanowire electrode onto the hydrothermal ZnO nanorods film. With suitable process condition, the nanorods film exhibits a uniform morphology to enable the formation of gas-permeable nanowire top electrode while also the nanorods provide good surface-to-volume ratio to deliver strong reaction with NO gas. A detection limit to 10 ppb NO is observed while the sensing dynamic range from 10 ppb to 100 ppb is obtained. The sensor is reversible and the real-time sensing response is within 30 s. The results benefit the NO breath detection for patients with chronic inflammatory airway disease, such as asthma.