氮化鎵晶圓接合及配合雷射移除藍寶石基板

Files

902216E009037.pdf (809.16 KB)

902216E009037.pdf (809.16 KB)

Date

Authors

YEWCHUNG SERMONWU

Keywords

晶圓接合 , 藍寶石基板 , 氮化鎵 , 雷射消融 , Wafer bonding , Saphhire substrate , Gallium nitride , Laser ablation

URI

https://www.grb.gov.tw/search/planDetail?id=673281&docId=128270
https://ir.lib.nycu.edu.tw/handle/11536/96841

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研究計畫;;Research Plans