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SiHx (x=1-4)矽薄膜沉積的天然氣表面反應
SiHx (x=1-4)矽薄膜沉積的天然氣表面反應
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Date
2015
Authors
布力汗
Putikam Raghunath
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https://www.grb.gov.tw/search/planDetail?id=11275664&docId=456412
https://ir.lib.nycu.edu.tw/handle/11536/130531
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