Design of a dual-probe profilometer

dc.citation.epage	69	en_US
dc.citation.spage	66	en_US
dc.citation.woscount	0	en_US
dc.contributor.author	Cheng, Chiao-Hua	en_US
dc.contributor.author	Hung, Shao-Kang	en_US
dc.contributor.author	Lin, Chih-Hsien	en_US
dc.contributor.department	機械工程學系	zh_TW
dc.contributor.department	Department of Mechanical Engineering	en_US
dc.date.accessioned	2017-04-21T06:48:52Z
dc.date.available	2017-04-21T06:48:52Z
dc.date.issued	2014	en_US
dc.description.abstract	This paper proposes a design of a dual-probe profilometer, which successfully utilizes a compensation method with two probe modules to scan a 200 nm step height standard sample with 5% scanning error. Compared with traditional profilometers, this design possesses high scanning precise performance without using large and heavy optical flats to increase the flatness when sample stage is moving. The experimental results show the compensation method is valid and can be applied in nano-scale scanning.	en_US
dc.identifier.isbn	978-1-4799-7923-3	en_US
dc.identifier.issn	2373-5422	en_US
dc.identifier.journal	2014 INTERNATIONAL CONFERENCE ON MANIPULATION, MANUFACTURING AND MEASUREMENT ON THE NANOSCALE (3M-NANO)	en_US
dc.identifier.uri	https://ir.lib.nycu.edu.tw/handle/11536/135884
dc.identifier.wosnumber	WOS:000380389000042	en_US
dc.language.iso	en_US	en_US
dc.subject	nanopositioner	en_US
dc.subject	optical lever	en_US
dc.subject	profilometer	en_US
dc.title	Design of a dual-probe profilometer	en_US
dc.type	Proceedings Paper	en_US

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