微影步進機衝量定位機構之實作---子計畫I：微影步進機之IDM定位機構動力模型分析與最佳控制(I)
| dc.contributor.author | 成維華 | en_US |
| dc.contributor.author | WEI-HUACHIENG | en_US |
| dc.contributor.department | 國立交通大學機械工程研究所 | zh_TW |
| dc.date.accessioned | 2014-12-13T10:34:02Z | |
| dc.date.available | 2014-12-13T10:34:02Z | |
| dc.date.issued | 2003 | en_US |
| dc.description.sponsorship | 行政院國家科學委員會 | zh_TW |
| dc.identifier.govdoc | NSC92-2212-E009-024 | zh_TW |
| dc.identifier.uri | https://www.grb.gov.tw/search/planDetail?id=877057&docId=168253 | en_US |
| dc.identifier.uri | https://ir.lib.nycu.edu.tw/handle/11536/92459 | |
| dc.language.iso | zh_TW | en_US |
| dc.title | 微影步進機衝量定位機構之實作---子計畫I：微影步進機之IDM定位機構動力模型分析與最佳控制(I) | zh_TW |
| dc.title | The Dynamic Analysis and Optimal Control of Impact Drive Mechanism for Lithograph Stepper (I) | en_US |
| dc.type | Plan | en_US |