Heterodyne moire surface profilometry

Abstract

In this study, a novel moire fringe analysis technique is proposed for measuring the surface profile of an object. After applying a relative displacement between two gratings at a constant velocity, every pixel of CMOS camera can capture a heterodyne moire signal. The precise phase distribution of the moire fringes can be extracted using a one-dimensional fast Fourier transform (FFT) analysis on every pixel, simultaneously filtering the harmonic noise of the moire fringes. Finally, the surface profile of the tested objected can be generated by substituting the phase distribution into the relevant equation. The findings demonstrate the feasibility of this measuring method, and the measurement error was approximately 4.3 mu m. The proposed method exhibits the merits of the Talbot effect, projection moire method, FFT analysis, and heterodyne interferometry. (C) 2014 Optical Society of America